Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
Shim, Seongbo, Shin, Youngsoo
Omschrijving
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.
Ik heb een vraag over het boek:
‘Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - Shim, Seongbo, Shin, Youngsoo’.
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