Nanoimprint Lithography: An Enabling Process for Nanofabrication
An Enabling Process for Nanofabrication
Omschrijving
Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes.
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